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14 February 2011 Optical position feedback and phase control of resonant 1D and 2D MOEMS-scanners
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Proceedings Volume 7930, MOEMS and Miniaturized Systems X; 79300S (2011) https://doi.org/10.1117/12.873261
Event: SPIE MOEMS-MEMS, 2011, San Francisco, California, United States
Abstract
Resonantly driven oscillating MOEMS mirrors have many applications in the fields of optics, telecommunication and spectroscopy. Assuring stable resonant oscillation with well controlled amplitude under varying environmental conditions is a complex task, which can impede or retard incorporation of such MOEMS mirrors in large systems. For this we have developed compact modules comprising optical position sensing and driver electronics with closed loop control, which can ensure stable resonant operation of 1D and 2D micro-mirrors. In this contribution we present in much detail the position encoding and feedback scheme, and show very first experimental results with the novel 2D device.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. Tortschanoff, A. Frank, M. Wildenhain, H. S. Tetikol, T. Sandner, H. Schenk, and A. Kenda "Optical position feedback and phase control of resonant 1D and 2D MOEMS-scanners", Proc. SPIE 7930, MOEMS and Miniaturized Systems X, 79300S (14 February 2011); https://doi.org/10.1117/12.873261
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