Integrated piezoresistive position detection for electrostatic driven micro scanning mirrors

Jan Grahmann; Thomas Graßhoff; Holger Conrad; Thilo Sandner; Harald Schenk

doi:10.1117/12.874979

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14 February 2011 Integrated piezoresistive position detection for electrostatic driven micro scanning mirrors

Jan Grahmann, Thomas Graßhoff, Holger Conrad, Thilo Sandner, Harald Schenk

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Proceedings Volume 7930, MOEMS and Miniaturized Systems X; 79300V (2011) https://doi.org/10.1117/12.874979
Event: SPIE MOEMS-MEMS, 2011, San Francisco, California, United States

Abstract

We have been developing a piezoresistive position detection for scanning micro mirrors in order to combine high position resolution with the capability of monolithic integration. In comparison to our formerly published results, the sensor sensitivity was strongly enhanced by implanting a 1 μm thick p-doped layer of NA ≈ 10¹⁷ cm^-3 into the lowly p-doped SOI device layer of NA ≈ 10¹⁵ cm^-3. This sensitivity was even further improved by at least a factor of 3 by a novel sensor design, allowing to couple more mechanical stress into the sensor structure.

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Jan Grahmann, Thomas Graßhoff, Holger Conrad, Thilo Sandner, and Harald Schenk "Integrated piezoresistive position detection for electrostatic driven micro scanning mirrors", Proc. SPIE 7930, MOEMS and Miniaturized Systems X, 79300V (14 February 2011); https://doi.org/10.1117/12.874979

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