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14 February 2011 Integrated piezoresistive position detection for electrostatic driven micro scanning mirrors
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Proceedings Volume 7930, MOEMS and Miniaturized Systems X; 79300V (2011) https://doi.org/10.1117/12.874979
Event: SPIE MOEMS-MEMS, 2011, San Francisco, California, United States
Abstract
We have been developing a piezoresistive position detection for scanning micro mirrors in order to combine high position resolution with the capability of monolithic integration. In comparison to our formerly published results, the sensor sensitivity was strongly enhanced by implanting a 1 μm thick p-doped layer of NA ≈ 1017 cm-3 into the lowly p-doped SOI device layer of NA ≈ 1015 cm-3. This sensitivity was even further improved by at least a factor of 3 by a novel sensor design, allowing to couple more mechanical stress into the sensor structure.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jan Grahmann, Thomas Graßhoff, Holger Conrad, Thilo Sandner, and Harald Schenk "Integrated piezoresistive position detection for electrostatic driven micro scanning mirrors", Proc. SPIE 7930, MOEMS and Miniaturized Systems X, 79300V (14 February 2011); https://doi.org/10.1117/12.874979
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