Consideration of sensitivity with respect to diaphragm thickness and waveguide position in silicon-based guided-wave optical accelerometer

Yusuke Miura; Hideto Endo; Takuya Oshima; Masashi Ohkawa; Takashi Sato

doi:10.1117/12.873660

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17 January 2011 Consideration of sensitivity with respect to diaphragm thickness and waveguide position in silicon-based guided-wave optical accelerometer

Yusuke Miura, Hideto Endo, Takuya Oshima, Masashi Ohkawa, Takashi Sato

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Proceedings Volume 7941, Integrated Optics: Devices, Materials, and Technologies XV; 79410P (2011) https://doi.org/10.1117/12.873660
Event: SPIE OPTO, 2011, San Francisco, California, United States

Abstract

Our group has developed a silicon-based guided-wave optical accelerometer with a proof mass centered on a diaphragm. For this type of accelerometer, it is strongly suggested that sensitivity is related to waveguide position, diaphragm dimensions, and size and weight of proof mass. In this study, sensitivity dependences on waveguide position and diaphragm thickness were considered experimentally. Experimental results demonstrated that the highest sensitivity could be obtained for the waveguide at the diaphragm edge and is inversely proportional to the square of the diaphragm thickness.

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Yusuke Miura, Hideto Endo, Takuya Oshima, Masashi Ohkawa, and Takashi Sato "Consideration of sensitivity with respect to diaphragm thickness and waveguide position in silicon-based guided-wave optical accelerometer", Proc. SPIE 7941, Integrated Optics: Devices, Materials, and Technologies XV, 79410P (17 January 2011); https://doi.org/10.1117/12.873660

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