Optical spectra of two-dimensional photonic crystal bars based on macroporous Si

Sergey A. Dyakov; Ekaterina V. Astrova; Tatiana S. Perova; Vladimir A. Tolmachev; Galina V. Fedulova; Anna Baldycheva; Viktor Yu. Timoshenko; Sergei G. Tikhodeev; Nikolay A. Gippius

doi:10.1117/12.882369

17 January 2011 Optical spectra of two-dimensional photonic crystal bars based on macroporous Si

Sergey A. Dyakov, Ekaterina V. Astrova, Tatiana S. Perova, Vladimir A. Tolmachev, Galina V. Fedulova, Anna Baldycheva, Viktor Yu. Timoshenko, Sergei G. Tikhodeev, Nikolay A. Gippius

Author Affiliations +

Proceedings Volume 7943, Silicon Photonics VI; 79431I (2011) https://doi.org/10.1117/12.882369
Event: SPIE OPTO, 2011, San Francisco, California, United States

Abstract

Two-dimensional (2D) photonic crystal (PC) bars with 6 and 21 periods were fabricated by simultaneous photoelectrochemical etching of macropores and trenches in a pre-patterned silicon wafer. The structures had square lattice of cylindrical pores and were terminated by nonmodulated silicon pre-layers. The infrared reflection spectra of the PC bars have been simulated using scattering matrix method. In order to take into account the roughness of pore inner surface an additional silicon layer around the pores was introduced with a fitted complex refractive index. A comparison between the simulated refection spectra and those obtained experimentally demonstrates a satisfactory agreement in the region of secondary photonic band gaps.

Citation Download Citation

Sergey A. Dyakov, Ekaterina V. Astrova, Tatiana S. Perova, Vladimir A. Tolmachev, Galina V. Fedulova, Anna Baldycheva, Viktor Yu. Timoshenko, Sergei G. Tikhodeev, and Nikolay A. Gippius "Optical spectra of two-dimensional photonic crystal bars based on macroporous Si", Proc. SPIE 7943, Silicon Photonics VI, 79431I (17 January 2011); https://doi.org/10.1117/12.882369

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available