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8 April 2011 Low-speckle holographic beam shaping of high-coherence EUV sources
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Abstract
This paper describes a method to arbitrarily shape and homogenize high-coherence extreme ultraviolet sources using time-varying holographic optical elements and a scanning subsystem to mitigate speckle. In systems with integration times longer than 100 ms, a speckle contrast below 1% can be achieved.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Christopher N. Anderson, Ryan H. Miyakawa, and Patrick P. Naulleau "Low-speckle holographic beam shaping of high-coherence EUV sources", Proc. SPIE 7969, Extreme Ultraviolet (EUV) Lithography II, 796938 (8 April 2011); https://doi.org/10.1117/12.881553
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