Author Affiliations +
Guo-Tsai Huang,1 Alex Chen,1 Tung-Yaw Kang,1 S. C. Lee,1 Frank Laske,2 Klaus-Dieter Roethe,2 DongSub Choi,3 Chiang Reinhart,4 John C. Robinson,5 You Seung Jin,5 Lin Chua,5 David Tien,5 Venkat R. Nagaswami5
1Taiwan Semiconductor Manufacturing Co. Ltd. (Taiwan)
2KLA-Tencor Corp. (Germany)
3KLA-Tencor Corp. (Korea, Republic of)
4KLA-Tencor Corp. (Taiwan)
5KLA-Tencor Corp. (United States)