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20 April 2011 Scatterometry simulator using GPU and evolutionary algorithm
Hirokimi Shirasaki
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Proceedings Volume 7971, Metrology, Inspection, and Process Control for Microlithography XXV; 79711T (2011) https://doi.org/10.1117/12.881505
Event: SPIE Advanced Lithography, 2011, San Jose, California, United States
Abstract
In this paper, we show scatterometry simulation software which has the spectroscopy calculation and optimization algorithm systems. The calculation is sped up by parallel computing using the GPU (Graphics Processor Unit). Here, we use the programming language CUDA (Compute Unified Device Architecture) and CULA (CULApack) for the NVIDIA GPU. We calculate the spectroscopy using the rigorous coupled wave analysis (RCWA) which provides a method for calculating the diffraction of electromagnetic waves by periodic grating. An evolutionary algorithm (EA) and a conjugate gradient (CG) method are used as the technique to automatically search the data which resembles the given spectrum. Then, the results using this simulator are provided.
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Hirokimi Shirasaki "Scatterometry simulator using GPU and evolutionary algorithm", Proc. SPIE 7971, Metrology, Inspection, and Process Control for Microlithography XXV, 79711T (20 April 2011); https://doi.org/10.1117/12.881505
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Cited by 2 scholarly publications and 3 patents.
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KEYWORDS
Scatterometry
Computer simulations
Evolutionary algorithms
Reflectivity
Optimization (mathematics)
Silicon
Finite-difference time-domain method
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