Aerial image retargeting (AIR): achieving litho-friendly designs

Ayman Yehia Hamouda; James Word; Mohab Anis; Karim S. Karim

doi:10.1117/12.882073

4 April 2011 Aerial image retargeting (AIR): achieving litho-friendly designs

Ayman Yehia Hamouda, James Word, Mohab Anis, Karim S. Karim

Author Affiliations +

Proceedings Volume 7974, Design for Manufacturability through Design-Process Integration V; 797411 (2011) https://doi.org/10.1117/12.882073
Event: SPIE Advanced Lithography, 2011, San Jose, California, United States

Abstract

In this work, we present a new technique to detect non-Litho-Friendly design areas based on their Aerial Image signature. The aerial image is calculated for the litho target (pre-OPC). This is followed by the fixing (retargeting) the design to achieve a litho friendly OPC target. This technique is applied and tested on 28 nm metal layer and shows a big improvement in the process window performance. For an optimized Aerial-Image-Retargeting (AIR) recipe is very computationally efficient and its runtime doesn't consume more than 1% of the OPC flow runtime.

Citation Download Citation

Ayman Yehia Hamouda, James Word, Mohab Anis, and Karim S. Karim "Aerial image retargeting (AIR): achieving litho-friendly designs", Proc. SPIE 7974, Design for Manufacturability through Design-Process Integration V, 797411 (4 April 2011); https://doi.org/10.1117/12.882073

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