Fiber-Optic Sensors Based On Resonating Mechanical Structures

T. S.J. Lammerink; S. J. Gerritsen

doi:10.1117/12.941087

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14 October 1987 Fiber-Optic Sensors Based On Resonating Mechanical Structures

T. S.J. Lammerink, S. J. Gerritsen

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Proceedings Volume 0798, Fiber Optic Sensors II; (1987) https://doi.org/10.1117/12.941087
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands

Abstract

A fiber-optic pressure sensor and a fiber-optic force sensor based on a resonating mechanical structure are developed. The accuracy and reproducibility mainly depend on the characteristics of the mechanical structure. Both structures are optically excited and the readout transducer consists of a simple optical displacement sensor, hence we have an all-optic design with its specific advantages. Further, the mechanical structure can be batch fabricated and the optic links can then be integrated with the structure. Optical transfer functions have been measured. With the proposed arrangement we obtain a signal-to-noise ratio better than 30 dB having the advantage of frequency signal transmission. The prototypes of the fiber-optic pressure sensor and the fiber-optic force sensor show the feasibility of micromechanical structures in fiber-optic sensors.

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T. S.J. Lammerink and S. J. Gerritsen "Fiber-Optic Sensors Based On Resonating Mechanical Structures", Proc. SPIE 0798, Fiber Optic Sensors II, (14 October 1987); https://doi.org/10.1117/12.941087

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