Author Affiliations +
Sang Hoon Han,1 Jihoon Na,1 Wonil Cho,1 Dong Hoon Chung,1 Chan-Uk Jeon,1 HanKu Cho,1 Dana Bernstein,2 Eun Young Park,2 Anoop Sreenath,2 Shmoolik Mangan2
1Samsung Electronics, Co., Ltd. (Korea, Republic of)
2Applied Materials (Israel)