Evidence of printing blank-related defects on EUV masks missed by blank inspection

Rik Jonckheere; Dieter Van den Heuvel; Tristan Bret; Thorsten Hofmann; John Magana; Israel Aharonson; Doron Meshulach; Eric Hendrickx; Kurt Ronse

doi:10.1117/12.883854

1 April 2011 Evidence of printing blank-related defects on EUV masks missed by blank inspection

Rik Jonckheere, Dieter Van den Heuvel, Tristan Bret, Thorsten Hofmann, John Magana, Israel Aharonson, Doron Meshulach, Eric Hendrickx, Kurt Ronse

Author Affiliations +

Proceedings Volume 7985, 27th European Mask and Lithography Conference; 79850W (2011) https://doi.org/10.1117/12.883854
Event: 27th European Mask and Lithography Conference, 2011, Dresden, Germany

Abstract

In this follow-up paper for our contribution at BACUS 2010, first evidence is shown that also the more advanced Lasertec M7360 has missed a few printing reticle defects caused by an imperfection of its EUV mirror, a so-called multilayer defect (ML-defect). This work continued to use a combination of blank inspection (BI), patterned mask inspection (PMI) and wafer inspection (WI) to find as many as possible printing defects on EUV reticles. The application of more advanced wafer inspection, combined with a separate repeater analysis for each of the multiple focus conditions used for exposure on the ASML Alpha Demo Tool (ADT) at IMEC, has allowed to increase the detectability of printing MLdefects. The latter uses the previous finding that ML-defects may have a through-focus printing behavior, i.e., they cause a different grade of CD impact on the pattern in their neighborhood, depending on the focus condition. Subsequent reticle review is used on the corresponding locations with both SEM (Secondary Electron Microscope) and AFM (Atomic Force Microscope). This review methodology has allowed achieving clear evidence of printing ML defects missed by this BI tool, despite of an unacceptable nuisance rate reported before. This is a next step in the investigation if it is possible to avoid actinic blank inspection (ABI) at all, the only presently known technique that is expected to be independent from the presence of a (residual) topography of the ML-defect at the top of the EUV mirror, in detecting those defects. This is considered an important asset of blank inspection, because the printability of a ML-defect on the EUV scanner and its detectability by ABI is determined by the distortion throughout the multilayer, not that at the surface.

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Rik Jonckheere, Dieter Van den Heuvel, Tristan Bret, Thorsten Hofmann, John Magana, Israel Aharonson, Doron Meshulach, Eric Hendrickx, and Kurt Ronse "Evidence of printing blank-related defects on EUV masks missed by blank inspection", Proc. SPIE 7985, 27th European Mask and Lithography Conference, 79850W (1 April 2011); https://doi.org/10.1117/12.883854

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