Structural and electrical properties of PLZT (8/65/35) thin films prepared by MOD method

Jianqiang Luo; Weiguo Liu; Shun Zhou; Xiaotao Sun

doi:10.1117/12.888385

18 February 2011 Structural and electrical properties of PLZT (8/65/35) thin films prepared by MOD method

Jianqiang Luo, Weiguo Liu, Shun Zhou, Xiaotao Sun

Proceedings Volume 7995, Seventh International Conference on Thin Film Physics and Applications; 79950G (2011) https://doi.org/10.1117/12.888385
Event: Seventh International Conference on Thin Film Physics and Applications, 2010, Shanghai, China

Abstract

Pyroelectric lead lanthanum zirconnate titanate (PbLa₈Zr₆₅Ti₃₅) thin films were prepared by a metal-organic decomposition (MOD) method on Pt(111)/Ti/SiO₂/Si(100) substrate. After annealing at different temperatures with the same annealing time, the amorphous films were transformed into polycrystalline PLZT films. The phase formation and surface microstructure were investigated by X-ray diffraction (XRD) and atom force microscopy (AFM). The XRD data showed the formation of pervoskite phase at 650°C and indicated suppression of pyrochlore phase as temperature increasing. The PLZT pyroelectric sensor was fabricated based on sensitive barrier layer instead of the other type barrier layer. Finally, dielectric and pyroelectric coefficients was also measured.

Citation Download Citation

Jianqiang Luo, Weiguo Liu, Shun Zhou, and Xiaotao Sun "Structural and electrical properties of PLZT (8/65/35) thin films prepared by MOD method", Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 79950G (18 February 2011); https://doi.org/10.1117/12.888385

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available