Optical properties of Ni(1-x)Mn(2+x)O4 films studied by spectroscopic ellipsometry

Leibo Zhang; Yun Hou; Zhiming Huang; Wei Zhou; Yanqing Gao

doi:10.1117/12.888207

18 February 2011 Optical properties of Ni_(1-x)Mn_(2+x)O₄ films studied by spectroscopic ellipsometry

Leibo Zhang, Yun Hou, Zhiming Huang, Wei Zhou, Yanqing Gao

Proceedings Volume 7995, Seventh International Conference on Thin Film Physics and Applications; 79950J (2011) https://doi.org/10.1117/12.888207
Event: Seventh International Conference on Thin Film Physics and Applications, 2010, Shanghai, China

Abstract

Transition metal oxide (TMO) has been extensively focused in recent years. In this paper, we investigate the optical properties of a typical TMO material of Ni_(1-x)Mn_(2+x)O₄ (x=0-1) thin films. Different compositions of x=0, 0.1, 0.2, 0.3 thin films are grown on Pt/Ti/SiO₂/Si substrates by chemical solution deposition method under annealing temperature of 750°C. X-ray diffraction patterns indicate that Ni_(1-x)Mn_(2+x)O₄ thin films are polycrystalline with spinel structure. The optical properties are investigated using spectroscopic ellipsometry at room temperature in the wavelength range of 400-1700nm. By fitting the measured ellipsometric data with a three-phase model (air/sample/Pt), the optical constants of thin films are determined. The refractive index and extinction coefficient don't show apparent variation with different composition. The obtained optical constants are very significant in the potential applications of optoelectronic devices.

Citation Download Citation

Leibo Zhang, Yun Hou, Zhiming Huang, Wei Zhou, and Yanqing Gao "Optical properties of Ni_(1-x)Mn_(2+x)O₄ films studied by spectroscopic ellipsometry", Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 79950J (18 February 2011); https://doi.org/10.1117/12.888207

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