Experiment study on laser damage characteristics of diamond-like carbon films

Shenjiang Wu; Wei Shi; Junhong Su; Junqi Xu; Yingxue Xi

doi:10.1117/12.888186

18 February 2011 Experiment study on laser damage characteristics of diamond-like carbon films

Shenjiang Wu, Wei Shi, Junhong Su, Junqi Xu, Yingxue Xi

Proceedings Volume 7995, Seventh International Conference on Thin Film Physics and Applications; 799510 (2011) https://doi.org/10.1117/12.888186
Event: Seventh International Conference on Thin Film Physics and Applications, 2010, Shanghai, China

Abstract

Diamond-like carbon (DLC) films were deposited by the Unbalanced Magnetron Sputtering(UBMS) technique which was under the conditions of bias 80V, target current 110A, argon flow 200SCCM, excitation current 100A; experimental platform was built for Laser-induced damage threshold(LIDT). The DLC films was irradiated by the laser (Wavelength 1046nm, pulse width 10ns, laser energy from 0.75mJ/cm²-2.60J/cm²), we got the LIDT of the DLC films is 1J/cm². The whole physical process from slight burning, spalling, crack splashing until the substance damage of the DLC films was observed by 1000 times magnification and interference microscope. Thermal stress is one of main factors that laser injures films.

Citation Download Citation

Shenjiang Wu, Wei Shi, Junhong Su, Junqi Xu, and Yingxue Xi "Experiment study on laser damage characteristics of diamond-like carbon films", Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 799510 (18 February 2011); https://doi.org/10.1117/12.888186

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available