Structural and optical characterisation of planar waveguides obtained via Sol-Gel

F. Rey-García; C. Gómez-Reino; M. T. Flores-Arias; G. F. De La Fuente; W. Assenmacher; W. Mader

doi:10.1117/12.891941

26 July 2011 Structural and optical characterisation of planar waveguides obtained via Sol-Gel

F. Rey-García, C. Gómez-Reino, M. T. Flores-Arias, G. F. De La Fuente, W. Assenmacher, W. Mader

Proceedings Volume 8001, International Conference on Applications of Optics and Photonics; 800116 (2011) https://doi.org/10.1117/12.891941
Event: International Conference on Applications of Optics and Photonics, 2011, Braga, Portugal

Abstract

Planar waveguides of SiO₂:TiO₂ (multilayer structure) and SiO₂:CeO₂ (thick layer) were prepared onto commercial glass substrates using a sol-gel technique combined with dip-coating. These glassy coatings were structural characterised by Transmission Electron Microscopy (TEM) Energy Dispersive X-ray analysis and by Confocal Microscopy. Thicknesses of 1230 nm and 4,15 μm and refractive indices of 1.59 and 1.48 for SiO₂:TiO₂ (70:30) and SiO₂:CeO₂ (95:5) waveguides were obtained, respectively, by Spectroscopic Ellypsometry. Losses of 0.8 dB/cm were measured by double prism method in the SiO₂:CeO₂ system.

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F. Rey-García, C. Gómez-Reino, M. T. Flores-Arias, G. F. De La Fuente, W. Assenmacher, and W. Mader "Structural and optical characterisation of planar waveguides obtained via Sol-Gel", Proc. SPIE 8001, International Conference on Applications of Optics and Photonics, 800116 (26 July 2011); https://doi.org/10.1117/12.891941

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