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3 November 2011 Michelson microscope interference objective for micro-structure topography measuring
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Nowadays, the trends of miniaturization of sensors and inspection devices have been of major importance in science and technology. The characterization of microchips, integrated circuits, MEMS, and micro-sensors is important to determine their proper operation. Due to their element small size may have structural fails for improper handling of them. This paper proposes the use of a Michelson interferometric objective for the determination of topographical features in materials at micro and nanoscale level. The main advantage of this method is its non-invasive nature that allows testing in soft materials without damage. The Michelson interferometric microscope objective with a magnification of 5X illuminated with a 632nm He-Ne laser is used. Fringes that allow the study of the topography of these structures are properly analyzed. The acquisition of the interferograms was performed by a CCD, which are handled by the method of phase-stepping. An integrated circuit of a CCD as target is used. A reconstruction of the microscopic topography of the sample produced results with a statistical error in the topography of 12nm. Application of this method is to conduct quality control tests in manufacture of electronic components such as micro-chips and integrated circuits.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
K. Hernández, R. Rodríguez-Vera, and J. Rayas "Michelson microscope interference objective for micro-structure topography measuring", Proc. SPIE 8011, 22nd Congress of the International Commission for Optics: Light for the Development of the World, 80117U (3 November 2011);

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