Translator Disclaimer
Paper
2 November 2011 Analysis of near field microwave and conventional optical images
Author Affiliations +
Abstract
In this work we present near field microwave images of microelectronic circuits and their interpretation to complement the conventional optical analysis. We show a highly simplified design of a resonant probe with dynamically tunable capacitive coupling and with high sensitivity. Images were obtained by measuring the microwave reflection coefficient operating a 7 GHz. This design represents a simplified and highly effective approach to implementing near field microwave microscopy.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Guillermo López-Maldonado, Naser Qureshi, Hesiquio Vargas-Hernández, César L. Ordóñez-Romero, M. Avendaño-Alejo, and Oleg V. Kolokoltsev "Analysis of near field microwave and conventional optical images", Proc. SPIE 8011, 22nd Congress of the International Commission for Optics: Light for the Development of the World, 801187 (2 November 2011); https://doi.org/10.1117/12.903423
PROCEEDINGS
9 PAGES


SHARE
Advertisement
Advertisement
Back to Top