High-Speed, Pulsed-Laser Interferometry

Osuk Y. Kwon; Dean M. Shough

doi:10.1117/12.967119

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1 January 1987 High-Speed, Pulsed-Laser Interferometry

Osuk Y. Kwon, Dean M. Shough

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Proceedings Volume 0802, In-Process Optical Metrology for Precision Machining; (1987) https://doi.org/10.1117/12.967119
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands

Abstract

This paper describes a phase-shifting, self-referencing, interferometer, designed for testing rapidly varying optical surfaces or a pulsed laser wavefront quality. It is the modified version of a general class of phase-shifting interferometers without moving parts: the phase shift and separation of beams are obtained with a stationary diffraction grating. The presentation includes results from experiments, and a review of the systems where its use might be appropriate.

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Osuk Y. Kwon and Dean M. Shough "High-Speed, Pulsed-Laser Interferometry", Proc. SPIE 0802, In-Process Optical Metrology for Precision Machining, (1 January 1987); https://doi.org/10.1117/12.967119

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