Diffractive elements manufactured by grey tone mask and global laser lightning for transportation applications

F. Quentel; K. Boehlen; J. Fieret; A. Holmes; P. Meyrueis; V. Raulot

doi:10.1117/12.886537

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26 May 2011 Diffractive elements manufactured by grey tone mask and global laser lightning for transportation applications

F. Quentel, K. Boehlen, J. Fieret, A. Holmes, P. Meyrueis, V. Raulot

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Proceedings Volume 8026, Photonic Applications for Aerospace, Transportation, and Harsh Environment II; 80260Q (2011) https://doi.org/10.1117/12.886537
Event: SPIE Defense, Security, and Sensing, 2011, Orlando, Florida, United States

Abstract

We report on a technology for multi-level microstructures manufacturing. Results are presented in the field of multilevel diffractive optical elements (DOEs) fabrication. The DOEs presented as examples are Fresnel lenses and Fourier computer generated holograms, calculated by means of a conventional Iterative Fourier Transform Algorithm. The DOEs have a typical pixel dimension of 5x5 μm² and are up to 512 by 512 pixels in size. The fabrication technique is based on polymer laser ablation through a chrome-on-quartz half-tone mask with a demagnifying high NA lens. In our case, the mask is imaged onto the polymer with a 5x, 0.13 NA reduction lens. The experimental results are presented and discussed.

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F. Quentel, K. Boehlen, J. Fieret, A. Holmes, P. Meyrueis, and V. Raulot "Diffractive elements manufactured by grey tone mask and global laser lightning for transportation applications", Proc. SPIE 8026, Photonic Applications for Aerospace, Transportation, and Harsh Environment II, 80260Q (26 May 2011); https://doi.org/10.1117/12.886537

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