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13 May 2011MEMS-based uncooled THz detectors for staring imagers
We review our previous work to develop an uncooled THz detector capable of achieving an NEΔT ~0.5K at
30Hz frame rate and describe our approach to develop a staring THz camera based on a 2D array of such
detectors. Both predicted and measured results of performance metrics (responsivity, NEP, response time,
spectral bandwidth, NEΔT) are presented. The measured performance agrees reasonably well with predictions
and is consistent with attaining our NEΔT goal. Thus far, 1x4 detector arrays have been fabricated, and 1x8
focal plane arrays have been developed and tested. We briefly discuss our vision to achieve a128x128
detector array needed for a practical staring THz imager and describe the technology challenges needed to
realize it.
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J. Allen Cox, R. Higashi, F. Nusseibeh, C. Zins, "MEMS-based uncooled THz detectors for staring imagers," Proc. SPIE 8031, Micro- and Nanotechnology Sensors, Systems, and Applications III, 80310D (13 May 2011); https://doi.org/10.1117/12.884066