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13 May 2011 Effect of surface chemistry on the quality factors of micromechanical resonators
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Abstract
Single monolayers of molecules were found to strongly affect the quality factors of MHz-range torsional silicon resonators. By changing a single monolayer of molecules on the surface of a 5-μm-wide, 250-nm-thick silicon resonator - less than 0.07% of the total mass - the quality factor of the resonator was increased by 70%. In contrast, the standard commercial coating, a thin layer of silicon oxide, dissipates at least 75% of the mechanical energy in similarly sized resonators. Since the relative importance of these surface chemical losses scales with the resonator's surface-to-volume ratio, the development of low-loss, stable surface chemistries will be important for the production of high-performance micro- and nano-mechanical devices.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Joshua A. Henry, Yu Wang, and Melissa A. Hines "Effect of surface chemistry on the quality factors of micromechanical resonators", Proc. SPIE 8031, Micro- and Nanotechnology Sensors, Systems, and Applications III, 80311A (13 May 2011); https://doi.org/10.1117/12.883185
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