Integration of CMM software standards for nanopositioning and nanomeasuring machines

E. Sparrer; T. Machleidt; T. Hausotte; E. Manske; K.-H. Franke

doi:10.1117/12.882822

13 May 2011 Integration of CMM software standards for nanopositioning and nanomeasuring machines

E. Sparrer, T. Machleidt, T. Hausotte, E. Manske, K.-H. Franke

Proceedings Volume 8031, Micro- and Nanotechnology Sensors, Systems, and Applications III; 80312G (2011) https://doi.org/10.1117/12.882822
Event: SPIE Defense, Security, and Sensing, 2011, Orlando, Florida, United States

Abstract

The paper focuses on the utilization of nanopositioning and nanomeasuring machines as a three dimensional coordinate measuring machine by means of the international harmonized communication protocol Inspection plus plus for Dimensional Measurement Equipment (abbreviated I++DME). I++DME was designed 1999 to enable the interoperability of different measuring hardware, like coordinate measuring machines, form tester, camshaft or crankshaft measuring machines, with a priori unknown third party controlling and analyzing software. Our recent work was focused on the implementation of a modular, standard conform command interpreter server for the Inspection plus plus protocol. This communication protocol enables the application of I++DME compliant graphical controlling software, which is easy to operate and less error prone than the currently used textural programming via MathWorks MATLab. The function and architecture of the I++DME command interpreter is discussed and the principle of operation is demonstrated by means of an example controlling a nanopositioning and nanomeasuring machine with Hexagon Metrology's controlling and analyzing software QUINDOS 7 via the I++DME command interpreter server.

Citation Download Citation

E. Sparrer, T. Machleidt, T. Hausotte, E. Manske, and K.-H. Franke "Integration of CMM software standards for nanopositioning and nanomeasuring machines", Proc. SPIE 8031, Micro- and Nanotechnology Sensors, Systems, and Applications III, 80312G (13 May 2011); https://doi.org/10.1117/12.882822

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