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12 May 2011 A compact and portable IR analyzer: progress of a MOEMS FT-IR system for mid-IR sensing
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Abstract
We show results on the progress in the development of MOEMS based FT spectrometers dedicated to operate in the mid-IR. Recent research is performed within an EC-FP7 project with the goal to show the feasibility of miniaturized high performance infrared spectroscopic chemical analyzers. Exploiting the high analyte selectivity of the mid-IR paired with the inherent sensitivity of an FT-IR spectrometer, such devices could be used in a wide range of applications, from air monitoring over in-line real-time process control to security monitoring. For practical applicability in these fields, appropriate detection limits and spectral quality standards have to be met. The presented system aims at a performance to measure in the range between 4000-700 cm-1 at a spectral resolution better than 10 cm-1, which would clearly outmatch previous MOEMS based spectrometer approaches. A further technological advantage is the rapid-scan capability. The MOEMS devices oscillate at 500 Hz. A spectrometer based on this device can acquire 1,000 scans per second in forward-backward mode. The interplay of all these components with the challenges in system integration will be described in detail and experimental results will be shown, presenting a significant step forward in smart spectroscopic sensors, microsystems technology and vibrational spectroscopy instrumentation.
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Andreas Kenda, Stephan Lüttjohann, Thilo Sandner, Martin Kraft, Andreas Tortschanoff, and Arno Simon "A compact and portable IR analyzer: progress of a MOEMS FT-IR system for mid-IR sensing", Proc. SPIE 8032, Next-Generation Spectroscopic Technologies IV, 80320O (12 May 2011); https://doi.org/10.1117/12.883841
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