Resonant cavity enhancement of polycrystalline PbTe films for IR detectors on Si-ROICs

Jianfei Wang; Timothy Zens; Juejun Hu; Piotr Becla; Anuradha M. Agarwal; Lionel C. Kimerling

doi:10.1117/12.884081

16 May 2011 Resonant cavity enhancement of polycrystalline PbTe films for IR detectors on Si-ROICs

Jianfei Wang, Timothy Zens, Juejun Hu, Piotr Becla, Anuradha M. Agarwal, Lionel C. Kimerling

Proceedings Volume 8034, Photonic Microdevices/Microstructures for Sensing III; 80340K (2011) https://doi.org/10.1117/12.884081
Event: SPIE Defense, Security, and Sensing, 2011, Orlando, Florida, United States

Abstract

In this paper, we demonstrate high optical quantum efficiency (90%) resonant-cavity-enhanced mid-infrared photodetectors fabricated monolithically on a silicon platform. High quality photoconductive polycrystalline PbTe film is thermally evaporated, oxygen-sensitized at room temperature and acts as the infrared absorber. The cavity-enhanced detector operates in the critical coupling regime and shows a peak responsivity of 100 V/W at the resonant wavelength of 3.5 μm, 13.4 times higher compared to blanket PbTe film of the same thickness. Detectivity as high as 0.72 × 10⁹cmHz^1/2W¹ has been measured, comparable with commercial polycrystalline mid-infrared photodetectors. As low temperature processing (< 160 °C) is implemented in the entire fabrication process, our detector is promising for monolithic integration with Si readout integrated circuits.

Citation Download Citation

Jianfei Wang, Timothy Zens, Juejun Hu, Piotr Becla, Anuradha M. Agarwal, and Lionel C. Kimerling "Resonant cavity enhancement of polycrystalline PbTe films for IR detectors on Si-ROICs", Proc. SPIE 8034, Photonic Microdevices/Microstructures for Sensing III, 80340K (16 May 2011); https://doi.org/10.1117/12.884081

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