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5 May 2011 Gas sensors based on MEMS structures made of ceramic ZrO2/Y2O3 material
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Proceedings Volume 8066, Smart Sensors, Actuators, and MEMS V; 80660N (2011) https://doi.org/10.1117/12.887500
Event: SPIE Microtechnologies, 2011, Prague, Czech Republic
Abstract
The methods of the fabrication of MEMS platforms based on yttria stabilized zirconia (YSZ) and alumina membranes for gas sensors used in harsh environmental conditions are described. It is shown that the application of such membranes permits a decrease in MEMS power consumption at 450°C down to ~75 mW at continuous and down to ~ 1 mW at pulse heating of gas sensor.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. A. Vasiliev, A. S. Lipilin, A. S. Lagutin, A. V. Pisliakov, N. P. Zaretskiy, N. N. Samotaev, and A. V. Sokolov "Gas sensors based on MEMS structures made of ceramic ZrO2/Y2O3 material", Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 80660N (5 May 2011); https://doi.org/10.1117/12.887500
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