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5 May 2011 Closed-loop synchronization scheme of resonant MOEMS-mirrors with two axes
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Proceedings Volume 8066, Smart Sensors, Actuators, and MEMS V; 80660O (2011) https://doi.org/10.1117/12.886481
Event: SPIE Microtechnologies, 2011, Prague, Czech Republic
Abstract
We have developed compact devices comprising optical position sensing and driver electronics with closed loop control, capable of driving resonant 1D- and 2D-MOEMS scanner mirrors. Position encoding is realized by measuring a laser beam reflected from the backside of the mirror. In the 2D-device we use cylindrical mirrors in order to suppress the deflection of the orthogonal dimension. This reduces the problem to the control of two independent 1D-oscillations and allows accurate position sensing. The phase between the oscillations of the two orthogonal axes is actively controlled to achieve a stable Lissajous figure. In this contribution we also demonstrate that this approach is scalable for synchronization of separate MEMS mirrors.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. Tortschanoff, A. Frank, M. Lenzhofer, M. Wildenhain, T. Sandner, and A. Kenda "Closed-loop synchronization scheme of resonant MOEMS-mirrors with two axes", Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 80660O (5 May 2011); https://doi.org/10.1117/12.886481
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