Design of linear and nonlinear hybrid optical MEMS displacement sensors

Wilfried Hortschitz; Franz Kohl; Harald Steiner; Matthias Sachse; Michael Stifter; Johannes Schalko; Artur Jachimowicz; Franz Keplinger

doi:10.1117/12.887631

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5 May 2011 Design of linear and nonlinear hybrid optical MEMS displacement sensors

Wilfried Hortschitz, Franz Kohl, Harald Steiner, Matthias Sachse, Michael Stifter, Johannes Schalko, Artur Jachimowicz, Franz Keplinger

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Proceedings Volume 8066, Smart Sensors, Actuators, and MEMS V; 80660P (2011) https://doi.org/10.1117/12.887631
Event: SPIE Microtechnologies, 2011, Prague, Czech Republic

Abstract

Although capacitive and piezoresistive readouts are commonly used for microelectromechanical structures, they suffer from serious drawbacks like limited range of displacement, inherent nonlinearity, insucient sensitivity, and technological complexity. Our complementary readout approach relies on a novel hybrid optomechanical device, where the displacement range is not limited by typical constraints of capacitive or piezoresistive conversion principles. Furthermore, no electrical connections are required on the micromechanical part. Moreover, this principle enables custom linear or nolinear output characteristics at the same technological effort.

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Wilfried Hortschitz, Franz Kohl, Harald Steiner, Matthias Sachse, Michael Stifter, Johannes Schalko, Artur Jachimowicz, and Franz Keplinger "Design of linear and nonlinear hybrid optical MEMS displacement sensors", Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 80660P (5 May 2011); https://doi.org/10.1117/12.887631

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