Analytical investigation of the pull-in voltage in capacitive mechanical sensors

J. Lardiès; M. Berthillier; F. M. L. Bellaredj

doi:10.1117/12.887460

5 May 2011 Analytical investigation of the pull-in voltage in capacitive mechanical sensors

J. Lardiès, M. Berthillier, F. M. L. Bellaredj

Proceedings Volume 8066, Smart Sensors, Actuators, and MEMS V; 80661N (2011) https://doi.org/10.1117/12.887460
Event: SPIE Microtechnologies, 2011, Prague, Czech Republic

Abstract

A MEMS capacitive sensor is basically an electrostatic transducer and an analytical approach to evaluate the pull-in voltage associated with a clamped circular plate or a circular membrane due to a bias voltage is presented. The approach is based on a linearized uniform approximation of the nonlinear electrostatic force due to a bias voltage and the use of a 2D load-deflection model for the clamped plate or membrane. In particular, the large deflection of the clamped thin, circular and isotropic plate is investigated when a transverse loading and an initial in-plane tension load are applied. The transition from plate behavior to membrane behavior is analyzed. The edge zone region is explored and properties of this region are given. The resulting electrostatic pressure on the diaphragm of the MEMS capacitive sensor and the pull-in voltage are studied.

Citation Download Citation

J. Lardiès, M. Berthillier, and F. M. L. Bellaredj "Analytical investigation of the pull-in voltage in capacitive mechanical sensors", Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 80661N (5 May 2011); https://doi.org/10.1117/12.887460

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