3D capacitive vibrational micro harvester using isotropic charging of electrets deposited on vertical sidewalls

Antwi Nimo; Ulrich Mescheder; Bernhard Müller; Awad Saad Abou Elkeir

doi:10.1117/12.886876

5 May 2011 3D capacitive vibrational micro harvester using isotropic charging of electrets deposited on vertical sidewalls

Antwi Nimo, Ulrich Mescheder, Bernhard Müller, Awad Saad Abou Elkeir

Author Affiliations +

Proceedings Volume 8066, Smart Sensors, Actuators, and MEMS V; 80661Q (2011) https://doi.org/10.1117/12.886876
Event: SPIE Microtechnologies, 2011, Prague, Czech Republic

Abstract

In this paper the design and fabrication of an integrated micro energy harvester capable of harvesting electrical energy from low amplitude mechanical vibrations is presented. A specific feature of the presented energy harvester is its capability to harvest vibrational energy from different directions (3D). This is done through an innovative approach for electrets placed on vertical sidewalls and thereby allowing for miniaturization of 3D capacitive energy harvester on monolithic CMOS substrates. A new simple electret charging method using ionic hair-dryers/hair ionizers is reported and shown that it can be effectively used for electrets-based micro energy harvesters.

Citation Download Citation

Antwi Nimo, Ulrich Mescheder, Bernhard Müller, and Awad Saad Abou Elkeir "3D capacitive vibrational micro harvester using isotropic charging of electrets deposited on vertical sidewalls", Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 80661Q (5 May 2011); https://doi.org/10.1117/12.886876

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