Microfabricated ultrashort cantilever probes for high speed AFM

C. Richter; P. Weinzierl; O. Krause; W. Engl; C. Penzkofer; B. Irmer; T. Sulzbach

doi:10.1117/12.886410

5 May 2011 Microfabricated ultrashort cantilever probes for high speed AFM

C. Richter, P. Weinzierl, O. Krause, W. Engl, C. Penzkofer, B. Irmer, T. Sulzbach

Proceedings Volume 8066, Smart Sensors, Actuators, and MEMS V; 80661S (2011) https://doi.org/10.1117/12.886410
Event: SPIE Microtechnologies, 2011, Prague, Czech Republic

Abstract

Atomic force microscopy (AFM) enables resolving features in the nanometer regime and allows in contrast to scanning tunneling microscopy (STM) measuring in liquids and a true atomic resolution also on isolating samples. But as all other scanning probe techniques the AFM requires serial data acquisition and suffers therefore from a low temporal resolution. Fast dynamical processes like most chemical reaction can not be observed in real time and the application as a tool for quality controls, e.g. in semicunductor indutries, fails often due to an unprofitable high time consumption. To enhance the scanning speed of an AFM we have developed, realized and tested different novel AFM-probes - one key component for high speed AFM- with small cantilevers and integrated sharp tips. Although such cantilevers have been presented and demonstrated on specific applications by different groups, our focus concentrates on widely dispersed applications and on aspects of mass fabrication like reproducibility and yield.

Citation Download Citation

C. Richter, P. Weinzierl, O. Krause, W. Engl, C. Penzkofer, B. Irmer, and T. Sulzbach "Microfabricated ultrashort cantilever probes for high speed AFM", Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 80661S (5 May 2011); https://doi.org/10.1117/12.886410

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