A speckle-based CMOS sensor array for arbitrary surface movement detection

Chao Wang; Steve Tanner; Pierre-André Farine

doi:10.1117/12.884798

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31 May 2011 A speckle-based CMOS sensor array for arbitrary surface movement detection

Chao Wang, Steve Tanner, Pierre-André Farine

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Proceedings Volume 8069, Integrated Photonics: Materials, Devices, and Applications; 80690Z (2011) https://doi.org/10.1117/12.884798
Event: SPIE Microtechnologies, 2011, Prague, Czech Republic

Abstract

The paper presents a CMOS sensor array for the detection of speckle movements, for applications requiring accurate movement tracking of arbitrary surfaces. The array is made of eight sensors incorporating each a spatial comb filter with a pitch of 2.8μm so as to be direction-sensitive to the movement of speckles with corresponding direction and spatial frequency, defined by the optical geometry of the system. The circuit is used with an array of micro-lenses placed between the sensor and the laser-illuminated surface. With speckle statistics (contrast, size) being independent on the surface properties, the detection works on virtually any surface. The system is operated at a sampling frequency of 64kHz. Integrated into a 180nm CMOS process, the circuit active area occupies 1.9mm² and consumes 290μW at full speed, allowing a maximal stable tracking speed of the surface of 0.25 m/s and a tracking accuracy of about 5μm.

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Chao Wang, Steve Tanner, and Pierre-André Farine "A speckle-based CMOS sensor array for arbitrary surface movement detection", Proc. SPIE 8069, Integrated Photonics: Materials, Devices, and Applications, 80690Z (31 May 2011); https://doi.org/10.1117/12.884798

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