Dark current study for CMOS fully integrated-PIN-photodiodes

Jordi Teva; Stefan Jessenig; Ingrid Jonak-Auer; Franz Schrank; Ewald Wachmann

doi:10.1117/12.886985

9 May 2011 Dark current study for CMOS fully integrated-PIN-photodiodes

Jordi Teva, Stefan Jessenig, Ingrid Jonak-Auer, Franz Schrank, Ewald Wachmann

Proceedings Volume 8073, Optical Sensors 2011; and Photonic Crystal Fibers V; 80731P (2011) https://doi.org/10.1117/12.886985
Event: SPIE Optics + Optoelectronics, 2011, Prague, Czech Republic

Abstract

PIN photodiodes are semiconductor devices widely used in a huge range of applications, such as photoconductors, charge-coupled devices and pulse oximeters for medical applications. The possibility to combine and to integrate the fabrication of the sensor with its signal conditioning circuitry in a CMOS process allows device miniaturization in addition to enhance its properties lowering the production and assembly costs. This paper presents the design and characterization of silicon based PIN photodiodes integrated in a CMOS commercial process. A high-resistivity, low impurity substrate is chosen as the start material for the PIN photodiode array fabrication in order to fabricate devices with a minimum dark current. The dark current is studied, analyzed and measured for two different starting materials and for different geometries. A model previously proposed is reviewed and compared with experimental data.

Citation Download Citation

Jordi Teva, Stefan Jessenig, Ingrid Jonak-Auer, Franz Schrank, and Ewald Wachmann "Dark current study for CMOS fully integrated-PIN-photodiodes", Proc. SPIE 8073, Optical Sensors 2011; and Photonic Crystal Fibers V, 80731P (9 May 2011); https://doi.org/10.1117/12.886985

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available