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26 May 2011 3D high-speed profilometer for inspection of micro-manufactured transparent parts
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Abstract
In micro manufacturing (MEMS, polymer hot-embossing, polymer roll-to-roll imprint, etc.) precise micro and nano-sized features are distributed over large areas. In order to inspect for defects or employ statistical process control on micromanufactured parts, metrological instruments must collect data with submicron resolution at a rate fast enough to keep up with the pace of production. Commercial inspection instruments fall short on meeting these challenging demands. In this paper we detail the design, implementation, and results of an optical system build to provide real-time inspection for transparent polymer microfluidic devices. Our current hardware demonstrates 0.5 micron lateral resolution with 1 micron vertical resolution at a rate of 640,000 voxels per second. Furthermore we demonstrate the ability to measure vertical sidewalls. The tilted orientation of our camera system provides access to these typically hidden or eclipsed areas. We conclude the paper with a direct comparison of our instrument's capabilities against a white light interferometer and laser scanning profilometer. The data demonstrates the difference between the instruments' lateral and vertical resolution, data acquisition rate, and vertical sidewall measurement capabilities.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dean M. Ljubicic and Brian W. Anthony "3D high-speed profilometer for inspection of micro-manufactured transparent parts", Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 808211 (26 May 2011); https://doi.org/10.1117/12.889564
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