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26 May 2011 Diffractive simultaneous lateral shearing interferometry
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Abstract
A lateral shearing interferometer usually provides the slope data of a wave front under test along one direction. For the complete reconstruction of the wavefront, two slope datasets along different directions are required. Based on diffractive gratings, a simultaneous measurement of bothdata sets can be carried out. Two possible realizations are presented using a polarization signature and a partially coherent light source.
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Vanusch Nercissian, Irina Harder, Klaus Mantel, Andreas Berger, and Norbert Lindlein "Diffractive simultaneous lateral shearing interferometry", Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 80821D (26 May 2011); https://doi.org/10.1117/12.895004
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