Design and fabrication of White Light Confocal Microscope with tunable resolution and sensitivity

E. Behroodi; A. Mousavian; H. Latifi

doi:10.1117/12.889250

27 May 2011 Design and fabrication of White Light Confocal Microscope with tunable resolution and sensitivity

E. Behroodi, A. Mousavian, H. Latifi

Proceedings Volume 8082, Optical Measurement Systems for Industrial Inspection VII; 808235 (2011) https://doi.org/10.1117/12.889250
Event: SPIE Optical Metrology, 2011, Munich, Germany

Abstract

Lateral and axial resolution and effective depth scanning range in white Light Confocal Microscope are related to the range of longitudinal chromatic aberration of system. In this article simulation and fabrication of white Light Confocal Microscope with tunable longitudinal chromatic aberration is discussed. The simulation has been done by Zemax optical design software. Generation of longitudinal chromatic aberration has been achieved by using two biconvex lenses with focal length of 30 mm and 40 mm and a 40x microscope objective. The effect of variation of distance between lenses on longitudinal chromatic aberration was studied. In addition the optical properties of microscope such as axial and lateral resolution, numerical aperture, effective depth scanning range and total shift of chromatic aberration in optical axis direction were studied. Using this setup with a broadband source of 480nm to 650nm tunable effective depth scanning range covering 23μm to 68μm was achieved. As a result tunable axial resolution of 48nm to 159nm was obtained. Regarding the scale of the sample we could use the optimum resolution.

Citation Download Citation

E. Behroodi, A. Mousavian, and H. Latifi "Design and fabrication of White Light Confocal Microscope with tunable resolution and sensitivity", Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 808235 (27 May 2011); https://doi.org/10.1117/12.889250

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