Time-resolved oblique incidence interferometer for vibration analysis of rough surface

Yasuhiro Mizutani; Takayuki Higuchi; Tetsuo Iwata; Yukitoshi Otani

doi:10.1117/12.889464

27 May 2011 Time-resolved oblique incidence interferometer for vibration analysis of rough surface

Yasuhiro Mizutani, Takayuki Higuchi, Tetsuo Iwata, Yukitoshi Otani

Proceedings Volume 8082, Optical Measurement Systems for Industrial Inspection VII; 80823J (2011) https://doi.org/10.1117/12.889464
Event: SPIE Optical Metrology, 2011, Munich, Germany

Abstract

This paper describes a motion-visualization technique for a sample with rough surface by using a stroboscopic oblique-incidence interferometer. To observe a vibrated rough surface, we focused on an oblique-incidence interferometer. The oblique-incidence interferometer is well suited to analysis the rough surface and a displacement of several micrometers because a scattering at a rough surface is reduced. However, by using a continuous light, a visibility of the fringe pattern at a vibrated surface in the ultrasonic region is not good. Therefore, the oblique-incidence interferometer is not suitable for analysis of the ultrasonic vibration. To overcome the problem, a pulsed light synchronized with a vibrated sample was used as a light source by an acousto-optic modulator. To control timing between a reference signal and an input signal of the light source by using a common oscillator, time-resolved behavior of the stator can be measured. By using the interferometer, we have succeeded to detect a periodically movement of a fringe pattern of the vibrated of the stator.

Citation Download Citation

Yasuhiro Mizutani, Takayuki Higuchi, Tetsuo Iwata, and Yukitoshi Otani "Time-resolved oblique incidence interferometer for vibration analysis of rough surface", Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 80823J (27 May 2011); https://doi.org/10.1117/12.889464

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