Submicron displacements measurement by measuring autocorrelation of the transmission function of a grating

K. Madanipour; M. T. Tavassoly

doi:10.1117/12.889556

27 May 2011 Submicron displacements measurement by measuring autocorrelation of the transmission function of a grating

K. Madanipour, M. T. Tavassoly

Proceedings Volume 8082, Optical Measurement Systems for Industrial Inspection VII; 80823O (2011) https://doi.org/10.1117/12.889556
Event: SPIE Optical Metrology, 2011, Munich, Germany

Abstract

When two similar gratings are superimposed, the transmission function of them varies with the displacement of one grating with respect to the other. The transmitted light intensity versus displacement is proportional to the autocorrelation of the transmission function of the gratings. In this paper, it is shown by measuring the latter function for gratings of pitches in order of a fraction of millimeter, submicron displacements can be measured. More precision is easily available by increasing the area of gratings and the detector gain. The presented technique is not expensive, complicated and sensitive to environmental vibrations.

Citation Download Citation

K. Madanipour and M. T. Tavassoly "Submicron displacements measurement by measuring autocorrelation of the transmission function of a grating", Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 80823O (27 May 2011); https://doi.org/10.1117/12.889556

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