Inverse calculation of position and tilt errors of optical components from wavefront data

H. Gilbergs; N. Wengert; K. Frenner; P. Eberhard; W. Osten

doi:10.1117/12.889521

23 May 2011 Inverse calculation of position and tilt errors of optical components from wavefront data

H. Gilbergs, N. Wengert, K. Frenner, P. Eberhard, W. Osten

Proceedings Volume 8083, Modeling Aspects in Optical Metrology III; 808314 (2011) https://doi.org/10.1117/12.889521
Event: SPIE Optical Metrology, 2011, Munich, Germany

Abstract

High performance optical systems pose very strict limits to positioning errors of the optical components inside the system. Identification and suppression of static and dynamic errors, like alignment errors due to drift or structural vibrations, can lead to superior imaging quality. A concept is presented that allows for intra process monitoring of deviations of a lens from its ideal position. It can track the movement of a lens by illumination through the rim such that the light reflects of the optical surfaces of the lens by total internal reflection before exiting the lens on the opposite side. A Shack-Hartmann wavefront sensor is applied to detect the wavefront. The wavefront-error caused by decenter or tilt of the lens is used for the reconstruction of the geometrical perturbations. Two approaches for the reconstruction of the geometrical properties from forward calculation data (model-based and regularization methods) are compared. Different light sources and geometrical setups can have an effect on the wavefront properties. A comparison is made to investigate their influence on the reconstruction quality. As the measurement principle does not interfere with the imaging process of the system, the method should be able to monitor the system during operation. This could enable real time tracking of errors up to the sampling rate of the detector making the method suitable for measurements of system dynamics. The method can potentially be enhanced to detect some lens deformations in combination with mechanical finite element simulation.

Citation Download Citation

H. Gilbergs, N. Wengert, K. Frenner, P. Eberhard, and W. Osten "Inverse calculation of position and tilt errors of optical components from wavefront data", Proc. SPIE 8083, Modeling Aspects in Optical Metrology III, 808314 (23 May 2011); https://doi.org/10.1117/12.889521

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