Advanced holographic methods in extreme ultraviolet interference lithography

Bernd Terhalle; Andreas Langner; Birgit Päivänranta; Yasin Ekinci

doi:10.1117/12.893733

23 September 2011 Advanced holographic methods in extreme ultraviolet interference lithography

Bernd Terhalle, Andreas Langner, Birgit Päivänranta, Yasin Ekinci

Proceedings Volume 8102, Nanoengineering: Fabrication, Properties, Optics, and Devices VIII; 81020V (2011) https://doi.org/10.1117/12.893733
Event: SPIE NanoScience + Engineering, 2011, San Diego, California, United States

Abstract

We study the formation of complex pattern geometries and beam shapes in diffraction-based extreme ultraviolet interference lithography. In particular, we demonstrate numerically as well as experimentally the potential of interfering multiple beams with well-controlled relative phase relations for the fabrication of high resolution periodic and quasiperiodic nanostructures.

Citation Download Citation

Bernd Terhalle, Andreas Langner, Birgit Päivänranta, and Yasin Ekinci "Advanced holographic methods in extreme ultraviolet interference lithography", Proc. SPIE 8102, Nanoengineering: Fabrication, Properties, Optics, and Devices VIII, 81020V (23 September 2011); https://doi.org/10.1117/12.893733

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