Fabrication of complex structures with an array of nanopinhole cameras

Hartmut S. Leipner; Nadine Geyer; Frank Syrowatka; Huang Cheng; Bodo Fuhrmann

doi:10.1117/12.893640

23 September 2011 Fabrication of complex structures with an array of nanopinhole cameras

Hartmut S. Leipner, Nadine Geyer, Frank Syrowatka, Huang Cheng, Bodo Fuhrmann

Proceedings Volume 8102, Nanoengineering: Fabrication, Properties, Optics, and Devices VIII; 81020W (2011) https://doi.org/10.1117/12.893640
Event: SPIE NanoScience + Engineering, 2011, San Diego, California, United States

Abstract

A method which combines colloidal lithography with the principle of a pinhole camera is presented for the fabrication of well-ordered arrays of complex structures. By using atomic beams, it is possible to overcome the diffraction limit of light for apertures with nanometer dimensions. There are no geometrical or chromatic aberrations, since no refracting elements exist. Limitations due to the finite size of the nanopinholes, which lead to a certain blurring of the replica, are discussed.

Citation Download Citation

Hartmut S. Leipner, Nadine Geyer, Frank Syrowatka, Huang Cheng, and Bodo Fuhrmann "Fabrication of complex structures with an array of nanopinhole cameras", Proc. SPIE 8102, Nanoengineering: Fabrication, Properties, Optics, and Devices VIII, 81020W (23 September 2011); https://doi.org/10.1117/12.893640

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