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31 August 2011 Opto-thermal actuation in double layer polymer microcantilevers
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Abstract
Photostructurable polymers, such as SU-8, have large potential impact on the field of MEMS/NEMS, allowing simple fabrication of plastic MEMS/NEMS devices with nearly vertical sidewalls and high aspect ratios using standard photolithographic procedures. Functional properties (as electrical conductivity or photoluminiscence) can be added to a photostructurable polymer by doping the material with nanoparticles and/or nanocrystals. We present here the case in which the resulting material presents opto-thermal properties if it is combined with an undoped polymer. From all the different mechanisms for heating the structure, opto-thermal actuation is interesting from the point of view that it is possible to obtain a mechanical energy transduction without requiring physical contact or proximity interaction, i.e. devices can be moved merely by focusing light on it.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
C. Martin-Olmos, L. G. Villanueva, A. Llobera, A. Voigt, G. Gruetzner, G. Abadal, and F. Perez-Murano "Opto-thermal actuation in double layer polymer microcantilevers", Proc. SPIE 8107, Nano-Opto-Mechanical Systems (NOMS), 81070A (31 August 2011); https://doi.org/10.1117/12.897353
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