Fabrication and properties of mechanically grooved silicon solar cells with buried contact Cu electrode

Pyungwoo Jang; Chi-Sup Jung; Kwang-Ho Kim; Seomoon Kyu

doi:10.1117/12.894409

13 September 2011 Fabrication and properties of mechanically grooved silicon solar cells with buried contact Cu electrode

Pyungwoo Jang, Chi-Sup Jung, Kwang-Ho Kim, Seomoon Kyu

Author Affiliations +

Proceedings Volume 8110, Thin Film Solar Technology III; 81100W (2011) https://doi.org/10.1117/12.894409
Event: SPIE Solar Energy + Technology, 2011, San Diego, California, United States

Abstract

Mechanically grooved silicon solar cells with buried contact copper electrode were attempted. In order to groove a simple mechanical grooving system was home-made, in which synchronous motors in hard disc driver (HDD), audio amplifier, signal generator were used. For the anti-reflection films sputtering condition for SiN_x films was optimized. With increasing input power, pressure, index of refraction of the films increased so that a very low etching rate of 0.8 nm/min could be achieved with a condition of Ar and N₂ flow rate of 5 SCCM, input power of 300 W and sputtering pressure of 1 × 10^-2 torr. Annealing condition for the formation of nickel silicie from electroless plated Ni-P layer was optimized as well as plating condition of copper electrode. However, the conversion efficiency of the BCSC in this study is 3.6% which is unexpectedly small. It seems that the reason for the low efficiency is due to short circuit forming in the lancet of the pyramid.

Citation Download Citation

Pyungwoo Jang, Chi-Sup Jung, Kwang-Ho Kim, and Seomoon Kyu "Fabrication and properties of mechanically grooved silicon solar cells with buried contact Cu electrode", Proc. SPIE 8110, Thin Film Solar Technology III, 81100W (13 September 2011); https://doi.org/10.1117/12.894409

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