Paper
24 September 2011 Self-assembled microlens on light emitting diodes using hydrophilic effect
Hsiang-Chun Wei, Guo-Dung John Su
Author Affiliations +
Abstract
In this paper, we propose a self-assembled microlens arrays (MLAs) on top of light emitting diodes (LEDs) based on hydrophilic effect by UV/ozone treatment. After hydrophilic zones were produced by UV/ozone treatment, the substrate with hydrophilic zones was dipped in and out of diluted SU-8 solution with slow and constant velocity. Finally, MLA was formed after UV curing and baking. By this approach, the fabrication is low cost and low time-consuming.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hsiang-Chun Wei and Guo-Dung John Su "Self-assembled microlens on light emitting diodes using hydrophilic effect", Proc. SPIE 8123, Eleventh International Conference on Solid State Lighting, 81231N (24 September 2011); https://doi.org/10.1117/12.894448
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Light emitting diodes

Photoresist materials

Microlens

Ultraviolet radiation

Lithography

Photomasks

Optical microscopy

Back to Top