Measuring the residual stress of transparent conductive oxide films on PET by the double-beam shadow Moiré interferometer

Hsi-Chao Chen; Kuo-Ting Huang; Yen-Ming Lo; Hsuan-Yi Chiu; Guan-Jhen Chen

doi:10.1117/12.893310

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26 September 2011 Measuring the residual stress of transparent conductive oxide films on PET by the double-beam shadow Moiré interferometer

Hsi-Chao Chen, Kuo-Ting Huang, Yen-Ming Lo, Hsuan-Yi Chiu, Guan-Jhen Chen

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Proceedings Volume 8126, Optical Manufacturing and Testing IX; 81260C (2011) https://doi.org/10.1117/12.893310
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States

Abstract

The purpose of this research was to construct a measurement system which can fast and accurately analyze the residual stress of the flexible electronics. The transparent conductive oxide (TCO) films, tin-doped indium oxide (ITO), were deposited by radio frequency (RF) magnetron sputtering using corresponding oxide targets on PET substrate. As we know that the shadow Moiré interferometry is a useable way to measure the large deformation. So we set up a double beam shadow Moiré interferometer to measure and analyze the residual stress of TCO films on PET. The feature was to develop a mathematical model and combine the image processing software. By the LabVIEW graphical software, we could measure the distance which is between the left and right fringe on the pattern to solve the curvature of deformed surface. Hence, the residual stress could calculate by the Stoney correction formula for the flexible electronics. By combining phase shifting method with shadow Moiré, the measurement resolution and accuracy have been greatly improved. We also had done the error analysis for the system whose relative error could be about 2%. Therefore, shadow Moiré interferometer is a non-destructive, fast, and simple system for the residual stress on TCO/PET films.

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Hsi-Chao Chen, Kuo-Ting Huang, Yen-Ming Lo, Hsuan-Yi Chiu, and Guan-Jhen Chen "Measuring the residual stress of transparent conductive oxide films on PET by the double-beam shadow Moiré interferometer", Proc. SPIE 8126, Optical Manufacturing and Testing IX, 81260C (26 September 2011); https://doi.org/10.1117/12.893310

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