Swing arm optical CMM: self calibration with dual probe shear test

Peng Su; Yuhao Wang; Chang Jin Oh; Robert E. Parks; James H. Burge

doi:10.1117/12.894203

27 September 2011 Swing arm optical CMM: self calibration with dual probe shear test

Peng Su, Yuhao Wang, Chang Jin Oh, Robert E. Parks, James H. Burge

Proceedings Volume 8126, Optical Manufacturing and Testing IX; 81260W (2011) https://doi.org/10.1117/12.894203
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States

Abstract

Swing arm optical CMM (SOC), a profilometer with distance measuring interferometric probe for in situ measurement of the topography of aspheric has been used for measuring highly aspheric mirrors with a performance rivaling full aperture interferometric tests. Recently, we implemented a dual probe self calibration mode for the SOC. Data from the dual probes can be used to calibrate the swing-arm air bearing errors since both probes see the same bearing errors while measuring different portions of the test surface. Bearing errors are reconstructed from the shear signal with a modal estimation.

Citation Download Citation

Peng Su, Yuhao Wang, Chang Jin Oh, Robert E. Parks, and James H. Burge "Swing arm optical CMM: self calibration with dual probe shear test", Proc. SPIE 8126, Optical Manufacturing and Testing IX, 81260W (27 September 2011); https://doi.org/10.1117/12.894203

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