Low noise surface mapping of transparent plane-parallel parts with a low coherence interferometer

Leslie L. Deck; Peter J. de Groot

doi:10.1117/12.893461

14 September 2011 Low noise surface mapping of transparent plane-parallel parts with a low coherence interferometer

Leslie L. Deck, Peter J. de Groot

Proceedings Volume 8133, Dimensional Optical Metrology and Inspection for Practical Applications; 81330G (2011) https://doi.org/10.1117/12.893461
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States

Abstract

A new instrument for measurements of thin transparent flats incorporates a novel in-line normal-incidence equal path interferometer, and extended broad-band illumination to isolate the surface of interest while reducing coherent noise and artifacts. Incorporating a 4Mpix camera, matching high resolution imaging system and vibration robust design; the instrument satisfies the needs of current and future hard disk and pellicle metrology.

Citation Download Citation

Leslie L. Deck and Peter J. de Groot "Low noise surface mapping of transparent plane-parallel parts with a low coherence interferometer", Proc. SPIE 8133, Dimensional Optical Metrology and Inspection for Practical Applications, 81330G (14 September 2011); https://doi.org/10.1117/12.893461

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