Development of a strain visualization system for microstructures using single fluorescent molecule tracking on a three-dimensional orientation microscope

Shintaro Yoshida; Keisuke Yoshiki; Takahiro Namazu; Nozomu Araki; Mamoru Hashimoto; Makoto Kurihara; Nobuyuki Hashimoto; Shozo Inoue

doi:10.1117/12.894329

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21 September 2011 Development of a strain visualization system for microstructures using single fluorescent molecule tracking on a three-dimensional orientation microscope

Shintaro Yoshida, Keisuke Yoshiki, Takahiro Namazu, Nozomu Araki, Mamoru Hashimoto, Makoto Kurihara, Nobuyuki Hashimoto, Shozo Inoue

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Proceedings Volume 8134, Optics and Photonics for Information Processing V; 81340E (2011) https://doi.org/10.1117/12.894329
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States

Abstract

We propose a technique that employs single fluorescent molecules for visualizing the distribution of strain induced in microstructures. We sprayed single-molecule tracers on microstructures by ultrasonic atomization and traced the position and orientation of the tracers by a single-molecule detection technique with a three-dimensional (3D) orientation microscope, which consists of a conventional fluorescent microscope and a polarization-mode converter. By using 3D spline interpolation, we visualized the surface geometry of a microelectromechanical (MEMS) device. We tracked the 3D position and orientation of tracers attached to a supporting beam of the MEMS mirror. The surface declination angles calculated from the orientation of the tracers were in agreement with the tilt angle obtained from the 3D position of the tracers.

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Shintaro Yoshida, Keisuke Yoshiki, Takahiro Namazu, Nozomu Araki, Mamoru Hashimoto, Makoto Kurihara, Nobuyuki Hashimoto, and Shozo Inoue "Development of a strain visualization system for microstructures using single fluorescent molecule tracking on a three-dimensional orientation microscope", Proc. SPIE 8134, Optics and Photonics for Information Processing V, 81340E (21 September 2011); https://doi.org/10.1117/12.894329

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