Spatial coherence studies on x-ray multilayers

Ch. Morawe; R. Barrett; K. Friedrich; R. Klünder; A. Vivo

doi:10.1117/12.894617

28 September 2011 Spatial coherence studies on x-ray multilayers

Ch. Morawe, R. Barrett, K. Friedrich, R. Klünder, A. Vivo

Author Affiliations +

Proceedings Volume 8139, Advances in X-Ray/EUV Optics and Components VI; 813909 (2011) https://doi.org/10.1117/12.894617
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States

Abstract

The degree of coherence preservation of x-ray multilayers was investigated using Talbot imaging on the ESRF undulator beamline ID06. Several W/B₄C multilayer mirrors with differing d-spacings were studied with monochromatic light at various photon energies. To understand the respective influence of the underlying substrate and the multilayer coatings, measurements were made under total reflection, at different Bragg peaks, and on the bare substrates. In addition, samples with different substrate quality were compared. The relation between spatial coherence preservation and the visibility of characteristic line structures in the x-ray beam will be discussed.

Citation Download Citation

Ch. Morawe, R. Barrett, K. Friedrich, R. Klünder, and A. Vivo "Spatial coherence studies on x-ray multilayers", Proc. SPIE 8139, Advances in X-Ray/EUV Optics and Components VI, 813909 (28 September 2011); https://doi.org/10.1117/12.894617

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