Interferometric Metrology: Current Trends And Future Prospects

P. Hariharan

doi:10.1117/12.941752

23 March 1987 Interferometric Metrology: Current Trends And Future Prospects

P. Hariharan

Author Affiliations +

Proceedings Volume 0816, Interferometric Metrology; (1987) https://doi.org/10.1117/12.941752
Event: 31st Annual Technical Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, San Diego, CA, United States

Abstract

Interferometric metrology is now experiencing a major resurgence of interest due to several new developments. This paper presents an overview of current trends and a brief discussion of future prospects.

Citation Download Citation

P. Hariharan "Interferometric Metrology: Current Trends And Future Prospects", Proc. SPIE 0816, Interferometric Metrology, (23 March 1987); https://doi.org/10.1117/12.941752

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