QoR analysis of fractured data solutions using distributed processing

Bhardwaj D. S. S.; Nageswara Rao; Ravi R. Pai; Nitin P. Bhat

doi:10.1117/12.898853

13 October 2011 QoR analysis of fractured data solutions using distributed processing

Bhardwaj D. S. S., Nageswara Rao, Ravi R. Pai, Nitin P. Bhat

Proceedings Volume 8166, Photomask Technology 2011; 81660S (2011) https://doi.org/10.1117/12.898853
Event: SPIE Photomask Technology, 2011, Monterey, California, United States

Abstract

Mask shops perform the QoR analysis of the fractured data by measuring the quality of the various basic metrics like the shot count, sliver count, smashed figure count, file size, shot perimeter, sliver perimeter, number of thin slivers etc. Other than the basic metrics mentioned above, the QoR of fractured data is also judged upon more advanced quality metrics like the number of CD splits, number of embedded and shoreline slivers as well as the lengths of embedded and shoreline slivers. Computation of these advanced metrics involves complex and compute-intensive algorithms, especially because the fractured mask data sizes have already reached hundreds of GBs. Hence, an efficient distributed processing solution with fast turn-around-time is required to measure the overall QoR metrics of fractured data solutions. This paper clearly describes the definitions of various QoR metrics and then describes parallelizable schemes to measure these QoR metrics. Another important QoR metric of the fractured data is the orientation-independent fracturing uniformity. Fracturing uniformity plays a significant role in ensuring CD uniformity. This paper introduces the concept of fracturing uniformity and discusses the issues in detecting the same.

Citation Download Citation

Bhardwaj D. S. S., Nageswara Rao, Ravi R. Pai, and Nitin P. Bhat "QoR analysis of fractured data solutions using distributed processing", Proc. SPIE 8166, Photomask Technology 2011, 81660S (13 October 2011); https://doi.org/10.1117/12.898853

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available